INFICON PSG018 Handleiding
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Pirani Gauge
PSG010, PSG017, PSG018
Operating Manual
Incl. EU Declaration of Conformity
tinb71e1-b24-09) (20
Product Identification
In all communications with INFICON, please specify the in-
formation given on the product nameplate. For convenient
reference copy that information into the space provided
below.
Validity
This document applies to products with the following part
numbers:
PSG 010
(W filament)
350400-
(DN - 10ISOKF)
PSG 017
(Ni filament)
PSG 018
(W filament)
350430-
350431-
350420- (DN -16ISOKF)
350424-
(DNCF 16-F)
35042-3 (DN -40CFF)
The part number () can be taken from the product namePN-
plate.
We reserve the right to make technical changes without prior
notice.
All dimensions are indicated in mm.
Intended Use
The Pirani Gauges PSGPSGPSG010, 017 and 018 have
been designed for vacuum measurement of gases in the
pressure range of 8×10
-4
… . 1000mbar
They must not be used for measuring flammable or combus-
tible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
The gauges can be operated in connection with the INFICON
VGC094 total pressure gauge controller.
1)
-With hightemperature cable.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and en-
vironmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried
out by persons who have suitable technical training and the
necessary experience or who have been instructed by the
enduser of the product.-
General Safety Instructions
•-Adhere to the applicable regulations and take the ne
cessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the
process media due to the heat generated by the product.
•-Adhere to the applicable regulations and take the ne
cessary precautions for all work you are going to do and
consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the enduser or third parties-
• disregard the information in this document
•- use the product in a nonconforming manner
•make any kind of changes (modifications, alterations etc.)
to the product
•use the product with accessories not listed in the product
documentation.
The enduser assumes the responsibility in conjunction with -
the process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (filament), are not covered by the
warranty.
2)
-With hightemperature cable or without cable.
Technical Data
Measurement principle thermal conductance accord-
ing to Pirani
Measurement range
(air, O
2
, CO, N
2
)
8×10
-4
… 10 00mbar
Accuracy PSG010up to factor 2of reading in the
range of ≥100 mbar
≈±20% of reading in the range
of 1×10
-1
… 10mbar
up to factor 2of reading in the
range of ≤10
-2
mbar
Accuracy PSG018
At room temperature and
cable length <20m
≈±10% of reading in the range
of 1×10
-2
… 100mbar
At 0 … +70°C and within the
entire range of specified
cable length
≈±20% of reading in the range
of 1×10
-2
… 100mbar
Within the entire specified
range of temperatures and
cable length
≈±35% of reading in the range
of 1×10
-2
… 100mbar
Repeatability with air
PSGPSG010, 017
≈±2% of reading in the range
of 1×10
-2
… 100mbar
PSG018
≈±5% of reading in the range
of 1×10
-2
… 100mbar
Materials PSG010
Inside wall of measurement
chamber, flange
Electrical feedthrough
Filter
Filament / filament holder
AlMgSi
FPM
sintered bronze
W / Ni
Materials PSG017
Inside wall of measurement
chamber, flange, diaphragm
Electrical feedthrough
Filament / filament holder
stainless steel
Al
2
O
3
Ni / Ni
Materials PSG018
Inside wall of measurement
chamber, flange, diaphragm
Electrical feedthrough
Filament / filament holder
stainless steel
Al
2
O
3
W / Ni
Radiation resistance
PSG010
–
PSGPSG017, 018
1×10
6
Gy
Overpressure
≤9 bar (limited to inert gases)
Cable length
Gaugecontroller -
depending on the measure-
ment unit
Admissible Temperatures
Operation
PSG010
PSG017
PSG018
0 … +70°C
0 … + °C 120
1)
0 … °C +120
1)
Bakeout
PSG010
PSGPSG017, 018
+100 °C
+250 °C
2)
Filament
PSGPSG010, 018
PSG017
+130 °C
+70 °C
Storage
–… °C 40+80
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50% at
+40 °C
Mounting orientation
any
Use indoors only
altitudes upto 2000 m
Pollution degree
2
Protection category
IP40
Dimensions [mm]
PSG010
PSGPSG 017, 018
Weight
PSG010
PSGPSG 017, 018
≈0.14 kg
≤1.2 kg
Gas Type Dependence
Indicated pressure (gauge calibrated for air)
Calibration factors for pressure range below 1 mbar
p
eff
= C × indicated pressure
Gas
type
Calibration
factor C
Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H
2
air, O
2
, CO, N
2
CO
2
water vapor
Freon12
0.5
1.0
0.9
0.5
0.7
Installation
Vacuum Connection
DANGER
Leakingprocess medi a
High-intensity mechanical, chemical or thermal
impacts can cause leaks in the measuring
sensor.rocess media can thus leak and P
possibly cause hazards, if overpressure is in the
vacuum system.
•Avoid -intensity mechanical, chemical or high
thermal impacts and overpressure in the
vacuum system.
• shut off Take appropriatemeasures (e.g. gas
supply, extraction, leak test) to avoidhazards
or damage due to leaking process media.
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering
ring.
DANGER
Protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN61010:
•CF connection fulfill this requirement
•-For gauges with a KF flange, use a conduc
tive metallic clamping ring
Caution
V acuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position.
ISO-KF flange
CF-F flange
Power Connection
Before connecting or disconnecting the product, turn
off the control system.
The gauge is connected to the controller via a measurement
cable (
→ "Accessories").
PSG 010
PSGPSG 017, 018
Model:
PN:
SN:
INFICON AG, LI-9496 Balzers
19
ø17
110
7.5
ø9.5
ø31
DN 10 ISO-KF
ø50
DN 16 ISO-KF
65.5
140
ø14
DN 16 CF-F
DN 40 CF-F
ø32
8
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
8
6
4
2
10
–3
p (mbar)
p
eff
(mbar)
10
–3
246
10
–2
246
10
–1
246
10
0
246
10
1
246
10
2
H
2
HeNe
Xe
Ar
CO
2
Freon 12
Air
O2
CO
N2
Kr
Indication range
above 10
-2
mbar
Water
vapor
Clamp
ISO-KF vacuum connection
Seal with centering ring
CF-F vacuum connection
Seal
Hex. bolts with nuts
DN 16 CF: M4×20 (6 pcs.)
DN 40 CF: M6×35 (6 pcs.)
Protective lid
R1: Filament
R2: Temp. compensator
2
5
41
R1
R2
NTC
3
1
2
4
5
1
4
23
R1
R2
NTC
Connections viewed from
the outside
red mark
2
1
3
4
R1: Filament
R2: Temp. compensator
(2024- 09)
Original: English
Operation
After connection the gauge is ready for operation.
When the gauge is operated for the first time, a zero
adjustment should be performed.
It is advisable to operate the gauge continuously, irrespective
of the pressure.
PSGPSG018: If the 017 and diaphragm is removed in order
to achieve shorter response times, sudden pressure changes
should be avoided in order to protect the filament.
The sensitivity of PSGthe nickel filament of the 017 gauge is
not the same as the sensitivity of the tungsten filament of the
PSGPSG 010 and 018 gauges.
Measurement cables influence the accuracy of
measurement. If cables with lengths over 20m are
used, p2-we strongly recommend adjusting the gauge
together with the cable. For details refer to the
operating instructions of the corresponding
controller.
Adjustment
The gauge is factory calibrated. For most applications, it
needs to be realigned. This allows to correct measurement
errors caused by spread between units, temperature and the
influence of the cable length. The gauge is aligned according
to the operating instructions of the measurement unit used.
For adjusting the gauge, operate the gauge under the same
ambient conditions and in the same mounting orientation as
normally.
Gas Type Dependence
The measurement value is gas dependent. The reading
applies to dry air, N
2,
O
2
and CO. For other gases, it has to
be converted (
→ Technical Data and operating instructions of
the corresponding controller).
In the pressure range below 1mbar this can be done by en -
te-ring the corresponding calibration factor on the control
ler(
→ Operating instructions of the corresponding controller).
Deinstallation
DANGER
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
V acuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Vent the vacuum system.
Put the gauge out of operation.
Unplug the sensor cable.
-Before connecting or disconnecting the pro
duct, turn off the control system.
Remove the gauge from the vacuum system and cover
the vacuum connection with the protective lid.
Maintenance, Troubleshooting
Gauge failures due to contamination or wear and
tear, as well as expendable parts (filament), are not
covered by the warranty.
Realignment at the measurement unit can become
necessary in the following events:
•Altering
• Contamination
•After cleaning
Cleaning
DANGER
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
V acuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Precondition: Gauge deinstalled
Clean or replace the filter (PSG … 010)
…PSGPSG. or clean the diaphragm (017, 018)
/ replace parts. Clean the gauge
DANGER
C leaning agents
Cleaning agents can be detrimental to
health and environment.
Adhere to the relevant regulations and
take the necessary precautions when han-
dling and disposing of cleaning agents.
Consider possible reactions with the pro-
duct materials (see "Technical data").
•Fill the measurement chamber with a solvent and
allow it to work for some time. Repeat this proce-
dure if necessary.
• Pour the solvent out.
•Rinse the vacuum chamber and the filter with alco-
hol for several times in order to remove all solvent
residues.
•≈Dry at 70 °C.
Insert the filter (PSGPSG010), resp. diaphragm (017,
PSG 018).
Troubleshooting
Fault
Possible cause
Remedy
Pressure
readings supplied
by gauge too high
Gauge contami-
nated
Minor deviations can
be compensated by
realignment at the
measurement unit
Clean the gauge
-Filter contami
nated (PSG010)
Clean or replace it
No useful indica-
tion
Filament broken
(an unbroken fila-
ment has a resis-
tance of ≈100 ) Ω
Replace the gauge
-Gauge cable de
fective, inter-
rupted, or short-
circuit
Repair or replace the
cable
Spare Parts
Ordering No.
Filter
B 4 G 1612003
Storage
Caution
V acuum component
Inappropriate storage leads to an increase of the
desorption rate and/or may result in mechanical
damage of the product.
Cover the vacuum ports of the product with
protective lids or grease free aluminum foil. Do
not exceed the admissible storage temperature
range (→ "Technical Data")
Returning the Product
WARNING
F orwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to the
forwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination
*)
.
*)
Form under www.inficon.com
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration
of contamination are returned to the sender at his own
expense.
Disposal
DANGER
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
w hen handling contaminated parts.
WARNING
Svironment ubstances detrimental to the en
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be de-
trimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
Literature
[1] www.inficon.com
Operating Manual
VGC094
tinb68e1
INFICON AG, LI- 0496 Balzers, Liechtenstein
EU -& UKCA Declaration of Conform
ity
We, INFICON, hereby declare that the equip-
ment mentioned below complywith the pro -
visions of the following EU directives and UK
regulations:
•5/EU, OJ L 2014/396/357, 29.3.2014
( LVDirective; directive relating to electrical
equipment designed for use within certain
voltage limit)
• L 2014/30/EU, OJ96/79, 29.3.2014
(EMC Directive; directive relating to electro-
magnetic compatibility)
• L 2011/65/EU, OJ174/88, 1.7.2011
(RoHS Directive; directive on the restriction of
the use of certain hazardous substances in
electrical and electronic equipment)
•S.I. 2016/1101, 11.2016
(The afety) eelectrical quipment (sregulations
2016)
• S.I. 2016/1091, 11.2016
(The lectromagnetic ompatibility egulations ecr
2016)
• S.I. 2012/3032, 12.2012
(The ruestriction of the se of certain azardous h
seubstances in lectrical and electronic quipe-
ment regulations 2012)
Products
Pirani Gauge
PSG010, PSG017, PSG018
(Operation with VGC094)
Standards
Harmonized and international/national standards and specifi-
cations:
•EN -3- A 610002:2014, Class
(EMC: limits for harmonic current emissions)
•EN -3- 610003:2013
(EMC: limitation of voltage changes, voltage fluctuations and
flicker)
•EN -6- 610001:2007
(EMC: generic immunity for residential, commercial and light-
industrial environments)
•EN -6-25 61000:200
(EMC: generic immunity standard for industrial environments)
•EN -6- 610004:2007 + A1:2011
(EMC: generic emission standard)
•EN - 610101:2010 + A1:2019 + A1:2019/AC:2019
(Safety requirements for electrical equipment for measurement,
control and laboratory use)
•EN -2- 61010030:2010
(Safety requirements for electrical equipment for measurement,
control and laboratory use)
•EN -; Group 1, Class A 613261:2013
(EMC requirements for electrical equipment for measurement,
control and laboratory use)
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI- 9496 Balzers
26 July 2023
26 July 2023
Rolf Enderes
Director Development &
Software
Dr. Roberto Salemme
Product Manager
Filter
Diaphragm
LI9496 Balzers–
Liechtenstein
Tel+423 / 388 3111
Fax+423 / 388 3700
www.inficon.com
Product specificaties
| Merk: | INFICON |
| Categorie: | Niet gecategoriseerd |
| Model: | PSG018 |
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