INFICON MAG060 Handleiding
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Cold Cathode Gauge
MAG050, MAG060, MAG070
Operating Manual
Incl. EU Declaration of Conformity
tinb43e101-a 24- (20)
Product Identification
In all communications with INFICON, please specify the infor-
mation on the product nameplate. For convenient reference
copy that information into the space provided below.
Validity
This document applies to products with part number
399840-
( -) MAG050, DN25ISOKF
399841- (MAG050, DN - 40ISOKF)
399842- (MAG050, DN -40CFF)
399845- (MAG060, DN - 40ISOKF)
399846- (MAG060, DN -40CFF)
399847- (MAG070, DN - 40ISOKF)
399848- (MAG070, DN -40CFF)
The part number can be taken from the product name(PN) -
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to the product MAG050 with
vacuum connection DN40other CF-F. They apply to the
products by analogy.
Intended Use
The above Cold Cathode Gauges have been designed for
vacuum measurement in the pressure range of
MAG050:2×10
-9
... 5×10
-3
mbar
MAG060:1×10
-10
... 5×10
-3
mbar
MAG070:1×10
-11
... 5×10
-3
mbar
They are used together with a INFICON measurement and
control unit of the types VGC083C(MAG050 and MAG060
only) . and VGC094
Functional Principle
The MAG050 / MAG060 / MAG070 function with a cold
cathode ionization measurement circuit (according to the
inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as logarithm of the pressure.
Safety
Symbols Used
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and envi-
ronmental damage.
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualification
All work described in this document may only be carried
out by persons who have suitable technical training and the
necessary experience or who have been instructed by the
enduser of the product.-
General Safety Instructions
•-Adhere to the applicable regulations and take the neces
sary precautions for the process media used.
•Consider possible reactions between the materials
( →Technical Data) and the process media.
•Consider possible reactions (e.g. explosion) of the pro-
cess media due to the heat generated by the product.
•-Adhere to the applicable regulations and take the neces
sary precautions for all work you are going to do and con-
sider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
DANGER
Mfields agnetic
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of ≥10 cm between
the magnet and the heart pacemaker or prevent
the influence of strong magnetic fields by anti-
magnetic shielding.
Communicate the safety instructions to all other users.
Responsibility and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the enduser or third parties-
• disregard the information in this document
•- use the product in a nonconforming manner
•make any kind of interventions (modifications, alterations,
etc.) on the product
•use the product with accessories not listed in the corre-
sponding product documentation.
The enduser assumes the responsibility in conjunction with -
the process media used.
Gauge failures due to contamination are not covered by the
warranty.
T echnical Data
Measurement principlecold cathode ionization
(inverted magnetron)
Measurement range (air, N
2
)
MAG050
2×10
-9
… 5×10
-3
mbar
MAG060
1×10
-10
… 5×10
-3
mbar
MAG070
1×10
-11
… 5×10
-3
mbar
Accuracy (N
2
, typical)
30% of reading
Repeatability (typical)
5% of reading
Gas type dependence
→ Appendix
Admissible temperatures
Storage
– … +80 40°C°C
Operation
MAG050
with standard cable
with high temp. cable
+5 … °C+80°C
+5 … °C+150°C
MAG060
with standard cable
with high temp. cable
+5 … °C+80°C
+5 … °C+250°C
MAG070
with standard cable
on request
+5 … °C+80°C
+5 … °C+250°C
Bakeout
MAG050
+150/o standard (w°C cable
or with high temp. ) cable
MAG060 °C (w/o standard cable +250
or with high temp. cable)
MAG 070
+250standard cable) (w/o °C
Relative humidity max. 80% at temperatures
up to +31decreasing to °C,
50% at +40 °C
Use rs only indoo
altitude up to 2000 m NN
Radiation resistance
MAG050
MAG060 / 070
–
10
7
Gy
Operating voltage
(in measuring chamber)
≤3.3 kV
Operating current
(in measuring chamber)
≤700 µA
Electrical connection
MAG050 / 060
Connector
Type
SHV
coaxial cable
MAG070
Connector
Type
triaxial--latching , pushpull self
triaxial cable
Cable length between gauge
and measurement unit
MAG050
max. 100 m
(40 m if the lower limit of the
measurement range is used
→ , [1][2]
-Operating Man
ual VGC083C, VGC094)
MAG060 m max. 100
(6 m if the lower limit of the
measurement range is used,
→ , -[1][2]Operating Man
ual VGC083C, VGC094)
MAG070
max. 500 m
Degree of protection
IP40
Overpressure 9 ≤bar
for inert gases and tempera-
tures <55°C only
Materials on the
vacuum side
Vacuum connection
Measuring chamber
DN ISO-KF 25
DN ISO-KF / CF-F 40
Feedthrough isolation
Internal seal MAG050
MAG060 / 070
Anode
Ignition aid
stainless steel (1.4306)
stainless steel (1.4104)
stainless steel (1.4306)
ceramic (Al
2
O
3
)
FPM
Ag
Mo
stainless steel (1.4310)
Internal volume
≈20 cm³
Dimensions [mm]
MAG050
MAG060
MAG070
Weight600g (DN -25ISOKF, DN -)40ISOKF
850g (DNCF 40-F)
Installation
Vacuum Connection
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
Overpressure in the vacuum system >2.5 bar
KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centering
ring.
DANGER
Protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN61010:
•ctions fulfill this requirement CF conne
•-For gauges with a KF flange, use a conduc
tive metallic clamping ring
Caution
V acuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
When CF vacuumconnections are made, it can be advanta -
geous to temporarily remove the magnet unit (Removing →
the Magnet Unit).
Mount the gauge so that no vibrations occur. Vibrations at
the gauge cause a deviation of the measured values.
The gauge may be mounted in any orientation.
To keep condensates and particles from getting into
the measuring chamber preferably choose a hori-
zontal to upright position.
Remove the protective lid and connect the product to the
vacuum system.
Keep the protective lid.
Removing the Magnet Unit
(CF vacuum connection only)
For reasons of tolerance, the same magnet unit has
to be used again when reassembling the gauge.
Tools Required
•- 7 Openend wrench AF
Procedure
(4) Unfasten the hex head screw(3) on the magnet unit
and remove the magnet unit.
The magnetic force and the tendency to tilt
make it more difficult to separate the magnet
unitand the measuring chamber (7).
Make the vacuum connection between the gauge and
the vacuum system.
Mount the magnet unit and lock it with the hex head
screw (3).
Electrical Connection
•Make sure the vacuum connection is properly
made.
• The VGC083C/ VGC094control unit must be
turnedoff before any work is performed on the
gauge or sensor cable.
Connect the sensor cable to the gauge and to the INFICON
measurement unit.
Operation
The gauge is ready for operation as soon as it has been
connected.
Gas type Dependence
The measuring signal depends on the type of gas being
measured. The value displayed is accurate for dry air, N
2
, O
2
and CO. It can be mathematically converted for other gases.
This can be done by entering the corresponding calibration
factor on the measurement unit (Appendix).INFICON →
Ignition Delay
When cold cathode measurement systems are activated, an
ignition delay occurs. The delay time increases at low pres-
sures and for clean, degassed gauges it is typically:
1×10
-7
minute mbar≈0.1
1×10
-8
1 minute mbar≈
1×10
-9
5 mbar≈minutes
1×10
-10
minutes (MAG060 only) mbar≈20/070
1×10
-11
minutes (MAG070 only) mbar≈90
The ignition is a statistical process. Already a small amount
of depositions on the inner surfaces can have a strong in-
fluence on it.
Contamination
Gauge failures due to contamination are not covered by the
warranty.
Cold ca-thode gauges are subject to contamination. The de
gree of contamination and subsequently the accuracy of the
measured value depend on:
• the pressure in the vacuum chamber
•-contaminants inside the vacuum chamber (vapors, pro
cess particles, etc.)
•ent current. the measurem
To avoid extensive contamination switch the gauge
on only at pressures of <10
-2
mbar.
VGC094 only: If the gauge is frequently operated at
pressures between 3×10
-
5
mbarand 1×10
-
2
mbar,
use measurement boards which limit the current to a
maximum of 100 µA (→Operating Manualof
INFICON VGC094). measurement boards for
Contamination generally has the effect that the pressure indi-
cation is too low. If the contamination is severe, instability
occurs. Contamination layers can peel off in the measuring
chamber and cause short circuits.
Depending on the operating conditions, cleaning may there-
fore be necessary after a few days or after a few years.
D einstallation
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
V acuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Procedure
Turn / VGC094 control unit. off the VGC083C
Vent the vacuum system and disconnect the sensor
cable from the gauge.
Remove gauge from the vacuum system and install the
protective lid.
Maintenance
Sensor failures due to contamination are not covered by the
warranty.
ø63.5
92
97.5
DN 40 CF-F
DN 25 ISO-KF
DN 40 ISO-KF
AF 7
Vacuum
chamber
4
3
7
Original: English
Cleaning the Gauge / Changing Parts
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
V acuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Precondition
•from vacuum system Gauge removed
Tools required
•Allen wrench AF 3
•- 7 Openend wrench AF
•Pliers for circlip
•Polishing cloth (grain 400) or Scotch-Brite™
•Tweezers
• Mounting tool for ignition aid
• Cleaning alcohol
Disassembling the Gauge
(MAG050 1, Figure 2, →FigureMAG060 →
MAG070 3 →Figure
Precondition
Gauge removed from vacuum system
Procedure
Unfasten the hex head screw (4) (3) on the magnet unit
and remove the magnet unit.
The magnetic force and the tendency to tilt
make it more difficult to separate the magnet
unit and the measuring chamber (7).
For reasons of tolerance, the same magnet
unit has to be used again when reassembling
the gauge.
Remove the circlip (5) and the pole insert (6) from the
measuring chamber (7).
MAG050 :/ 060 hex socket screws Loosen the 2(1a)
and remove the coaxial connector(2a).
MAG:070 Carefully unscrew triaxial connector, 2 hex
socket screws (1a) and remove the plastic part (2a).
Remove the 4 hex socket screws (8) incl. the lock
washers(8a) on the back of the measuring chamber
(7).
MAG050: Carefully remove the following items in this
order: pressure piece (9), complete (10), FPM anode
seal(11) and (12). inner ring
MAG060 :/ 070 Carefully remove the following items in
this order: pressure piece (9), washer (10b), complete
anode(10), metal seal(12) (11) and centering ring .
The parts can now be cleaned or replaced individually
( next section). →
Cleaning the Gauge
Procedure
DANGER
Adhere to the relevant regulations and take the necessary
precautions when handling and disposing of cleaning
agents.
Cleaning the measuring chamber and the pole insert:
Clean the inside walls of the measuring chamber and
the pole insert to a bright finish. Use a polishing cloth.
Caution
Sealing surfacecally. s must only be worked concentri
Rinse the measuring chamber and the pole insert with
alcohol.
Dry both.
Cleaning or replacing the anode (10):
example with Remove the old ignition aid (10a), for
tweezers.
Rub the anode pin to a bright finish by means of a
polish ing cloth.
Caution
Do not bend the anode.
Do not carry out mechanical work on the ceramic
part.
Rinse the anode with cleaning alcohol.
Dry the anode.
Insert the new ignition aid (10a) into the mounting tool.
Carefully press the anode (cleaned or new) centered
and parallel to the tool axis into the ignition aid and in-
sert it to a depth of mm. The final position is estab-≈15
lished only after the anode is installed.
Assembling the Gauge
Procedure
MAG050: Insert the FPM seal (12) with the inner
ring (7). (11) centered into the measuring chamber
Sealing surface, seal and ceramic part must be clean
( figure →1).
MAG060 :/ 070 (11) with the Insert new metal seal
centering ring(12) centered into the measuring
chamber (7). Sealing surface, seal and ceramic part
must be clean (2).→ figure
Carefully insert the anode (10) incl. ignition aid (10a)
into the measuring chamber.
Place the pressure piece (9) incl. Washer (10b) on the
measuring chamberand tighten the screws (7) (8) incl.
lock washers (8a) uniformly until the stop position is
reached.
Position the ignition aid (10a): slide the mounting tool
over the anode pin until the mechanical stop is
reached.
Remove particles in the measuring chamber (7) by
blowing with dry nitrogen (while the flange of the
measuring chamber is pointing downward).
Slide the pole insert (6) into the measuring chamber (7)
up to the mechanical stop (MAG050 → Figure 1,
MAG060 Figure, MAG070 → 2)→ Figure 3).
Place the circlip (5) snugly fitting on the pole insert.
Visually check that the anode pin is centered
over the hole of the pole insert (tolerated ec-
centricity mm). ≤0.5
If possible perform a leak test
(leak rate <10
-
9
m l/s). bar
MAG050 / 060: Place the coaxial connector(2a) on the
measuring chamber and tighten both hex socket
screws (1a).
MAG0:70 Place plastic piece (2a) onto the chamber
(7), tighten both hex socket screws (1) including the
locking washers (1a) and screw in the triaxial connector
(2) carefully.
Mount the magnet unit (4) and lock it with the
screw (3).
Figure 1: MAG050
Figure 2: MAG060
Figure 3: MAG070
Troubleshooting
Problem
Possible cause
Correction
The measurement
values indicated
are too low
Gauge contaminated
Clean the gauge
Spare Parts/ Accessories
When ordering spare parts, always indicate:
• all information on the nameplate
•description and ordering number according to spare parts
list
MAG050
Position
→. 1fig
Ordering
number
Maintenance kit
Inner ring
O-ring, 3.69×1.78
O- ring, 10.82×1.78
Ignition aid
(11)
—
1)
(12)
(10a)
351999
Repair kit
O- ring, 10.82×1.78
Anode complete
Inner ring
Ignition aid
(12)
(10)
(11)
(10a)
BN -T 846252
1)
O-ring not used.
MAG060 / 070
Position
→
fig. 2/3
Ordering
number
Maintenance kit
Metal seal, 9×1.6
Centering ring
Ignition aid
Washer
(11)
(12)
(10a)
(10b)
351997-
Repair kit
Anode complete
Washer
Metal seal, 9×1.6
Centering ring
Ignition aid
(10)
(10b)
(11)
(12)
(10a)
351990-
Returning the Product
F orwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to the
forwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination (form
under www.inficon.com).
Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of the
customer.
Products not accompanied by a duly completed declaration
of contamination are returned to the sender at his own ex-
pense.
Disposal
C ontaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Svironment ubstances detrimental to the en
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be de-
trimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accord-
ance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to their
materials and recycled.
Appendix
Gas Type Dependence
Indicated pressureauge calibrated for air) (g
In the range below10
-
5
indication is mbar the pressure
linear. For gases other than air the pressure can be deter-
mined by means of a simple conversion formula:
p
eff
= C × displayed pressure
where
Gas type
C
Air (N
2
, O
2
,
CO)
1.0
Xe
0.4
Kr
0.5
Ar
0.8
H
2
2.4
Ne
4.1
He
5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In
this case accurate determination is only possible
with a partial pressure measuring instrument, e.g.
an INFICON quadrupole mass spectrometer.
Literature
[1] www.inficon.com
Operating Manual
VGC083C
tinb42e1
INFICON AG, LI-, Liechtenstein 0496 Balzers
[2] www.inficon.com
Operating Manual
VGC094
tinb68e1
INFICON AG, LI- 0496 Balzers, Liechtenstein
EU / UKCADeclaration of Conformity
We, INFICON, hereby declare that the equip-
ment mentioned below complywith the pro -
visions of the following EU directives and UK
regulations:
•5/EU, OJ L 2014/396/357, 29.3.2014
( LVDirective; directive relating to electrical
equipment designed for use within certain
voltage limit)
• L 2014/30/EU, OJ96/79, 29.3.2014
(EMC Directive; directive relating to electro-
magnetic compatibility)
• L 2011/65/EU, OJ174/88,1.7.2011
(RoHS Directive; directive on the restriction of
the use of certain hazardous substances in
electrical and electronic equipment)
•S.I. 2016/1101, 11.2016
(eesrThe lectrical quipment (afety) egulations
2016)
• S.I. 2016/1091, 11.2016
(ecThe lectromagnetic ompatibility egulations r
2016)
•S.I. 2012/3032, 12.2012
(ruThe estriction of the se of certain azardous h
seubstances in lectrical and electronic quipe-
ment regulations 2012)
Products
Cold Cathode Gauge
MAG050, MAG060, MAG070
(Operation with VGC094: MAG050, MAG060, MAG070)
(OVGC083C: MAG050, MAG060 only) peration with
Standards
Harmonized and international/national standards and specifi-
cations:
•EN -3- A *610002:2014, Class
)
(EMC: limits for harmonic current emissions)
•EN -3- *610003:2013
)
(EMC: limitation of voltage changes, voltage fluctuations and
flicker)
•EN -6- *610001:2007
)
(EMC: generic immunity for residential, commercial and light-
industrial environments)
•EN -6-25 61000:200
(EMC: generic immunity standard for industrial environments)
•EN -6-4 61000:2007 + A1:2011
(EMC: generic emission standard)
•EN -**610101:2010
)
(Safety requirements for electrical equipment for measurement,
control and laboratory use)
•EN - *610101:2010+ A1:2019+ A1:2019/AC:2019
)
(Safety requirements for electrical equipment for measurement,
control and laboratory use)
•EN -2- *61010030:2010
)
(Safety requirements for electrical equipment for measurement,
control and laboratory use)
•EN -; Group Class A 613261:20131,
(EMC requirements for electrical equipment for measurement,
control and laboratory use)
*
)
Operation with VGC094 only
**
)
Operation with VGC083C only
Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI- 9496 Balzers
26 July202 3
26 July 2023
Rolf Enderes
Director Development &
Software
Dr. Roberto Salemme
Product Manager
LI9496 Balzers–
Liechtenstein
Tel+423 / 388 3111
Fax+423 / 388 3700
www.inficon.com
Product specificaties
| Merk: | INFICON |
| Categorie: | Niet gecategoriseerd |
| Model: | MAG060 |
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