INFICON PSG017 Handleiding

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Pirani Gauge

PSG010, PSG017, PSG018

Operating Manual

Incl. EU Declaration of Conformity

tinb71e1-b24-09) (20

Product Identification

In all communications with INFICON, please specify the in-

formation given on the product nameplate. For convenient

reference copy that information into the space provided

below.

Validity

This document applies to products with the following part

numbers:

PSG 010

(W filament)

350400-

(DN - 10ISOKF)

PSG 017

(Ni filament)

PSG 018

(W filament)

350430-

350431-

350420- (DN -16ISOKF)

350424-

(DNCF 16-F)

35042-3 (DN -40CFF)

The part number () can be taken from the product namePN-

plate.

We reserve the right to make technical changes without prior

notice.

All dimensions are indicated in mm.

Intended Use

The Pirani Gauges PSGPSGPSG010, 017 and 018 have

been designed for vacuum measurement of gases in the

pressure range of 8×10

-4

… . 1000mbar

They must not be used for measuring flammable or combus-

tible gases in mixtures containing oxidants (e.g. atmospheric

oxygen) within the explosion range.

The gauges can be operated in connection with the INFICON

VGC094 total pressure gauge controller.

1)

-With hightemperature cable.

Safety

Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and en-

vironmental damage.

Caution

Information on correct handling or use. Disregard can lead

to malfunctions or minor equipment damage.

Personnel Qualifications

Skilled personnel

All work described in this document may only be carried

out by persons who have suitable technical training and the

necessary experience or who have been instructed by the

enduser of the product.-

General Safety Instructions

•-Adhere to the applicable regulations and take the ne

cessary precautions for the process media used.

Consider possible reactions with the product materials.

Consider possible reactions (e.g. explosion) of the

process media due to the heat generated by the product.

•-Adhere to the applicable regulations and take the ne

cessary precautions for all work you are going to do and

consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum

components are contaminated. Adhere to the relevant

regulations and take the necessary precautions when

handling contaminated parts.

Communicate the safety instructions to all other users.

Liability and Warranty

INFICON assumes no liability and the warranty becomes null

and void if the enduser or third parties-

• disregard the information in this document

•- use the product in a nonconforming manner

•make any kind of changes (modifications, alterations etc.)

to the product

•use the product with accessories not listed in the product

documentation.

The enduser assumes the responsibility in conjunction with -

the process media used.

Gauge failures due to contamination or wear and tear, as

well as expendable parts (filament), are not covered by the

warranty.

2)

-With hightemperature cable or without cable.

Technical Data

Measurement principle thermal conductance accord-

ing to Pirani

Measurement range

(air, O

2

, CO, N

2

)

8×10

-4

… 10 00mbar

Accuracy PSG010up to factor 2of reading in the

range of ≥100 mbar

≈±20% of reading in the range

of 1×10

-1

… 10mbar

up to factor 2of reading in the

range of ≤10

-2

mbar

Accuracy PSG018

At room temperature and

cable length <20m

≈±10% of reading in the range

of 1×10

-2

… 100mbar

At 0 … +70°C and within the

entire range of specified

cable length

≈±20% of reading in the range

of 1×10

-2

… 100mbar

Within the entire specified

range of temperatures and

cable length

≈±35% of reading in the range

of 1×10

-2

… 100mbar

Repeatability with air

PSGPSG010, 017

≈±2% of reading in the range

of 1×10

-2

… 100mbar

PSG018

≈±5% of reading in the range

of 1×10

-2

… 100mbar

Materials PSG010

Inside wall of measurement

chamber, flange

Electrical feedthrough

Filter

Filament / filament holder

AlMgSi

FPM

sintered bronze

W / Ni

Materials PSG017

Inside wall of measurement

chamber, flange, diaphragm

Electrical feedthrough

Filament / filament holder

stainless steel

Al

2

O

3

Ni / Ni

Materials PSG018

Inside wall of measurement

chamber, flange, diaphragm

Electrical feedthrough

Filament / filament holder

stainless steel

Al

2

O

3

W / Ni

Radiation resistance

PSG010

–

PSGPSG017, 018

1×10

6

Gy

Overpressure

≤9 bar (limited to inert gases)

Cable length

Gaugecontroller -

depending on the measure-

ment unit

Admissible Temperatures

Operation

PSG010

PSG017

PSG018

0 … +70°C

0 … + °C 120

1)

0 … °C +120

1)

Bakeout

PSG010

PSGPSG017, 018

+100 °C

+250 °C

2)

Filament

PSGPSG010, 018

PSG017

+130 °C

+70 °C

Storage

–… °C 40+80

Relative humidity ≤80% at temperatures

≤+31 °C, decreasing to 50% at

+40 °C

Mounting orientation

any

Use indoors only

altitudes upto 2000 m

Pollution degree

2

Protection category

IP40

Dimensions [mm]

PSG010

PSGPSG 017, 018

Weight

PSG010

PSGPSG 017, 018

≈0.14 kg

≤1.2 kg

Gas Type Dependence

Indicated pressure (gauge calibrated for air)

Calibration factors for pressure range below 1 mbar

p

eff

= C × indicated pressure

Gas

type

Calibration

factor C

Gas type Calibration

factor C

He

Ne

Ar

Kr

Xe

0.8

1.4

1.7

2.4

3.0

H

2

air, O

2

, CO, N

2

CO

2

water vapor

Freon12

0.5

1.0

0.9

0.5

0.7

Installation

Vacuum Connection

DANGER

Leakingprocess medi a

High-intensity mechanical, chemical or thermal

impacts can cause leaks in the measuring

sensor.rocess media can thus leak and P

possibly cause hazards, if overpressure is in the

vacuum system.

•Avoid -intensity mechanical, chemical or high

thermal impacts and overpressure in the

vacuum system.

• shut off Take appropriatemeasures (e.g. gas

supply, extraction, leak test) to avoidhazards

or damage due to leaking process media.

DANGER

Overpressure in the vacuum system >1 bar

Injury caused by released parts and harm

caused by escaping process gases can result if

clamps are opened while the vacuum system is

pressurized.

Do not open any clamps while the vacuum sys-

tem is pressurized. Use the type clamps which

are suited to overpressure.

DANGER

Overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g.

O-rings) cannot withstand such pressures.

Process media can thus leak and possibly

damage your health.

Use O-rings provided with an outer centering

ring.

DANGER

Protective ground

Incorrectly grounded products can be extremely

hazardous in the event of a fault.

The gauge must be electrically connected to the

grounded vacuum chamber. This connection

must conform to the requirements of a protective

connection according to EN61010:

•CF connection fulfill this requirement

•-For gauges with a KF flange, use a conduc

tive metallic clamping ring

Caution

V acuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

The gauge may be mounted in any orientation. To

keep condensates and particles from getting into the

measuring chamber preferably choose a horizontal

to upright position.

ISO-KF flange

CF-F flange

Power Connection

Before connecting or disconnecting the product, turn

off the control system.

The gauge is connected to the controller via a measurement

cable (

→ "Accessories").

PSG 010

PSGPSG 017, 018

Model:

PN:

SN:

INFICON AG, LI-9496 Balzers

19

ø17

110

7.5

ø9.5

ø31

DN 10 ISO-KF

ø50

DN 16 ISO-KF

65.5

140

ø14

DN 16 CF-F

DN 40 CF-F

ø32

8

10

2

8

6

4

2

10

1

8

6

4

2

10

0

8

6

4

2

10

–1

8

6

4

2

10

–2

8

6

4

2

10

–3

p (mbar)

p

eff

(mbar)

10

–3

246

10

–2

246

10

–1

246

10

0

246

10

1

246

10

2

H

2

HeNe

Xe

Ar

CO

2

Freon 12

Air

O2

CO

N2

Kr

Indication range

above 10

-2

mbar

Water

vapor

Clamp

ISO-KF vacuum connection

Seal with centering ring

CF-F vacuum connection

Seal

Hex. bolts with nuts

DN 16 CF: M4×20 (6 pcs.)

DN 40 CF: M6×35 (6 pcs.)

Protective lid

R1: Filament

R2: Temp. compensator

2

5

41

R1

R2

NTC

3

1

2

4

5

1

4

23

R1

R2

NTC

Connections viewed from

the outside

red mark

2

1

3

4

R1: Filament

R2: Temp. compensator

(2024- 09)

Original: English

Product specificaties