INFICON MPG40X Handleiding
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Operating Manual
tina48e1-c (2017-10)1
Inverted Magnetron Pirani Gauge
MPG400
MPG401
2
tina48e1-c (2017-10) MPG400-401.om
In all communications with INFICON, please specify the information given on the
product nameplate. For convenient reference copy that information into the space
provided below:
This document applies to products with part number:
MPG400 (FPM sealed) MPG401 (all-metal)
351-010 (DN 25 ISO-KF) 351-020 (DN 25 ISO-KF)
351-011 (DN 40 ISO-KF) 351-021 (DN 40 ISO-KF)
351-012 (DN 40 CF-C) 351-022 (DN 40 CF-C)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to the product with part number 351-010. They apply to the other
products by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The Inverted Magnetron Pirani Gauges MPG400 und MPG401 has been designed
for vacuum measurement in the pressure range of 5×10
-9
… 1000 mbar.
The Inverted Magnetron Pirani Gauges must not be used for measuring flammable
or combustible gases which react in air.
The gauges can be used with an INFICON Controller of the VGC40x / VGC50x
series or with another evaluation unit.
Over the whole measuring range, the measuring signal is output as a logarithm of
the pressure.
The gauge consists of two separate measuring systems (the Pirani and the cold
cathode system according to the inverted magnetron principle). They are combined
in such a way that for the user, they behave like one measuring system
Product Identification
Validity
Intended Use
Functional Principle
tina48e1-c (2017-10) MPG400-401.om3
Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 2
1Safety 4
1.1Symbols Used 4
1.2Personnel Qualifications 4
1.3General Safety Instructions 4
1.4Liability and Warranty 5
2Technical Data 6
3Installation 9
3.1Vacuum Connection 9
3.1.1Removing the Magnet Unit (Only for Gauges With CF Flanges) 11
3.2Electrical Connection 12
3.2.1Use With an INFICON Controller 12
3.2.2Use With Another Control Device 12
4Operation 13
4.1Measurement Principle, Measuring Behavior 13
5Deinstallation 15
6Maintenance 16
6.1Adjusting the Gauge 16
6.2Cleaning MPG400, Replacing Parts 18
6.2.1Disassembling MPG400 18
6.2.2Cleaning MPG400 19
6.2.3Reassembling MPG400 20
6.3Cleaning MPG401, Replacing Parts 21
6.3.1Disassembling MPG401 22
6.3.2Cleaning MPG401 23
6.3.3Reassembling MPG401 24
6.4Troubleshooting 25
7Accessories 26
8Spare Parts 26
9Returning the Product 28
10Disposal 28
Appendix 29
A:Measuring Signal vs. Pressure 29
B:Gas Type Dependence 30
ETL Certification 31
For cross-references within this document, the symbol (→ XY) is used.
Product specificaties
| Merk: | INFICON |
| Categorie: | Niet gecategoriseerd |
| Model: | MPG40X |
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