INFICON PPG550 Handleiding

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Operating Manual

Incl. EU Declaration of Conformity

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MEMS Pirani & Piezo Diaphragm Gauge

Analog output with either RS232 or RS485 interface

PPG550

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In all communications with INFICON, please specify the information on the product

nameplate.For convenient reference copy that information into the space provided

below.

This document applies to products with the following part numbers:

INFICON PCG55x/ PSG55x, Leybold TTR101N

GP/ MKS 275

MKS910 / 925 / 901P

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document corres-

pond to gauge with part number 3PPM-001-DDR3. They apply to the other gauges

by analogy.

Product Identification

Validity

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The MEMS Pirani & Piezo Diaphragm Gauge PPG550has been designed for

vacuum measurement of gases in the pressure rangeof1×10

-6

… 1333 mbar.

Itmust not be used for measuring flammable or combustible gases in mixtures

containing oxidants (e.g. atmosphericoxygen) within the explosion range.

The PPG gauge is a combination gauge consisting of a MEMS Pirani sensor and a

MEMS Piezo diaphragm sensor. Both sensors are constantly active.

At low pressures, only the signal of the MEMS Pirani sensor is used for pressure

measurement; at high pressures, only the signal of the MEMSPiezo diaphragm

sensor. To determine the output signal in the intermediate range, both signals are

used proportionally to the pressure.

Intended Use

Functional Principle

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Product specificaties

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