INFICON PPG570 Handleiding
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Operating Manual
Incl. EU Declaration of Conformity
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MEMS Pirani & Piezo Diaphragm Gauge + ATM
Sensor
Analog output with either RS232 or RS485 interface
PPG570
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In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.
This document applies to products with the following part numbers:
1)
INFICON PCG55x/ PSG55x, Leybold TTR101N
2)
GP/ MKS 275
3)
MKS910 / 925 / 901P
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document corres-
pond to gauge with part number 3PPM-001-GDR3. They apply to the other gauges
by analogy.
Product Identification
Validity
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The MEMS Pirani & Piezo Diaphragm Gauge PPG570 has been designed for
vacuum measurement of gases in the pressure rangeof1×10
-6
… 1333 mbar.
Itmust not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The PPG gauge is a combination gauge consisting of a MEMS Pirani sensor, a
MEMS Piezo diaphragm sensorand an ATMPiezo diaphragm sensor. Thethree
sensors are constantly active.
At low pressures, only the signal of the MEMS Pirani sensor is used for pressure
measurement; at high pressures, only the signal of the MEMSPiezo diaphragm
sensor. To determine the output signal in the intermediate range, both signals are
used proportionally to the pressure.The barometric MEMS Piezodiaphragm
sensormeasuresambient atmospheric pressure.
Thegauge combines theMEMS diaphragm piezo sensor and heat-loss MEMS
Pirani sensor with a barometric MEMS piezo diaphragm sensor.
Intended Use
Functional Principle
Product specificaties
| Merk: | INFICON |
| Categorie: | Niet gecategoriseerd |
| Model: | PPG570 |
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