INFICON MAG050 Handleiding

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Cold Cathode Gauge

MAG050, MAG060, MAG070

Operating Manual

Incl. EU Declaration of Conformity

tinb43e101-a 24- (20)

Product Identification

In all communications with INFICON, please specify the infor-

mation on the product nameplate. For convenient reference

copy that information into the space provided below.

Validity

This document applies to products with part number

399840-

( -) MAG050, DN25ISOKF

399841- (MAG050, DN - 40ISOKF)

399842- (MAG050, DN -40CFF)

399845- (MAG060, DN - 40ISOKF)

399846- (MAG060, DN -40CFF)

399847- (MAG070, DN - 40ISOKF)

399848- (MAG070, DN -40CFF)

The part number can be taken from the product name(PN) -

plate.

If not indicated otherwise in the legends, the illustrations in

this document correspond to the product MAG050 with

vacuum connection DN40other CF-F. They apply to the

products by analogy.

Intended Use

The above Cold Cathode Gauges have been designed for

vacuum measurement in the pressure range of

MAG050:2×10

-9

... 5×10

-3

mbar

MAG060:1×10

-10

... 5×10

-3

mbar

MAG070:1×10

-11

... 5×10

-3

mbar

They are used together with a INFICON measurement and

control unit of the types VGC083C(MAG050 and MAG060

only) . and VGC094

Functional Principle

The MAG050 / MAG060 / MAG070 function with a cold

cathode ionization measurement circuit (according to the

inverted magnetron principle).

Over the whole measurement range, the measuring signal is

output as logarithm of the pressure.

Safety

Symbols Used

Information on preventing any kind of physical injury.

Information on preventing extensive equipment and envi-

ronmental damage.

Information on correct handling or use. Disregard can lead

to malfunctions or minor equipment damage.

Personnel Qualification

All work described in this document may only be carried

out by persons who have suitable technical training and the

necessary experience or who have been instructed by the

enduser of the product.-

General Safety Instructions

•-Adhere to the applicable regulations and take the neces

sary precautions for the process media used.

•Consider possible reactions between the materials

( →Technical Data) and the process media.

•Consider possible reactions (e.g. explosion) of the pro-

cess media due to the heat generated by the product.

•-Adhere to the applicable regulations and take the neces

sary precautions for all work you are going to do and con-

sider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum

components are contaminated. Adhere to the relevant

regulations and take the necessary precautions when

handling contaminated parts.

DANGER

Mfields agnetic

Strong magnetic fields can disturb electronic

devices like heart pacemakers or impair their

function.

Maintain a safety distance of ≥10 cm between

the magnet and the heart pacemaker or prevent

the influence of strong magnetic fields by anti-

magnetic shielding.

Communicate the safety instructions to all other users.

Responsibility and Warranty

INFICON assumes no liability and the warranty becomes null

and void if the enduser or third parties-

• disregard the information in this document

•- use the product in a nonconforming manner

•make any kind of interventions (modifications, alterations,

etc.) on the product

•use the product with accessories not listed in the corre-

sponding product documentation.

The enduser assumes the responsibility in conjunction with -

the process media used.

Gauge failures due to contamination are not covered by the

warranty.

T echnical Data

Measurement principlecold cathode ionization

(inverted magnetron)

Measurement range (air, N

2

)

MAG050

2×10

-9

… 5×10

-3

mbar

MAG060

1×10

-10

… 5×10

-3

mbar

MAG070

1×10

-11

… 5×10

-3

mbar

Accuracy (N

2

, typical)

30% of reading

Repeatability (typical)

5% of reading

Gas type dependence

→ Appendix

Admissible temperatures

Storage

– … +80 40°C°C

Operation

MAG050

with standard cable

with high temp. cable

+5 … °C+80°C

+5 … °C+150°C

MAG060

with standard cable

with high temp. cable

+5 … °C+80°C

+5 … °C+250°C

MAG070

with standard cable

on request

+5 … °C+80°C

+5 … °C+250°C

Bakeout

MAG050

+150/o standard (w°C cable

or with high temp. ) cable

MAG060 °C (w/o standard cable +250

or with high temp. cable)

MAG 070

+250standard cable) (w/o °C

Relative humidity max. 80% at temperatures

up to +31decreasing to °C,

50% at +40 °C

Use rs only indoo

altitude up to 2000 m NN

Radiation resistance

MAG050

MAG060 / 070

–

10

7

Gy

Operating voltage

(in measuring chamber)

≤3.3 kV

Operating current

(in measuring chamber)

≤700 µA

Electrical connection

MAG050 / 060

Connector

Type

SHV

coaxial cable

MAG070

Connector

Type

triaxial--latching , pushpull self

triaxial cable

Cable length between gauge

and measurement unit

MAG050

max. 100 m

(40 m if the lower limit of the

measurement range is used

→ , [1][2]

-Operating Man

ual VGC083C, VGC094)

MAG060 m max. 100

(6 m if the lower limit of the

measurement range is used,

→ , -[1][2]Operating Man

ual VGC083C, VGC094)

MAG070

max. 500 m

Degree of protection

IP40

Overpressure 9 ≤bar

for inert gases and tempera-

tures <55°C only

Materials on the

vacuum side

Vacuum connection

Measuring chamber

DN ISO-KF 25

DN ISO-KF / CF-F 40

Feedthrough isolation

Internal seal MAG050

MAG060 / 070

Anode

Ignition aid

stainless steel (1.4306)

stainless steel (1.4104)

stainless steel (1.4306)

ceramic (Al

2

O

3

)

FPM

Ag

Mo

stainless steel (1.4310)

Internal volume

≈20 cm³

Dimensions [mm]

MAG050

MAG060

MAG070

Weight600g (DN -25ISOKF, DN -)40ISOKF

850g (DNCF 40-F)

Installation

Vacuum Connection

DANGER

Overpressure in the vacuum system >1 bar

Injury caused by released parts and harm

caused by escaping process gases can result if

clamps are opened while the vacuum system is

pressurized.

Do not open any clamps while the vacuum sys-

tem is pressurized. Use the type clamps which

are suited to overpressure.

DANGER

Overpressure in the vacuum system >2.5 bar

KF connections with elastomer seals (e.g.

O-rings) cannot withstand such pressures. Pro-

cess media can thus leak and possibly damage

your health.

Use O-rings provided with an outer centering

ring.

DANGER

Protective ground

Incorrectly grounded products can be extremely

hazardous in the event of a fault.

The gauge must be electrically connected to the

grounded vacuum chamber. This connection

must conform to the requirements of a protective

connection according to EN61010:

•ctions fulfill this requirement CF conne

•-For gauges with a KF flange, use a conduc

tive metallic clamping ring

Caution

V acuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

When CF vacuumconnections are made, it can be advanta -

geous to temporarily remove the magnet unit (Removing →

the Magnet Unit).

Mount the gauge so that no vibrations occur. Vibrations at

the gauge cause a deviation of the measured values.

The gauge may be mounted in any orientation.

To keep condensates and particles from getting into

the measuring chamber preferably choose a hori-

zontal to upright position.

Remove the protective lid and connect the product to the

vacuum system.

Keep the protective lid.

Removing the Magnet Unit

(CF vacuum connection only)

For reasons of tolerance, the same magnet unit has

to be used again when reassembling the gauge.

Tools Required

•- 7 Openend wrench AF

Procedure

 (4) Unfasten the hex head screw(3) on the magnet unit

and remove the magnet unit.

The magnetic force and the tendency to tilt

make it more difficult to separate the magnet

unitand the measuring chamber (7).

Make the vacuum connection between the gauge and

the vacuum system.

Mount the magnet unit and lock it with the hex head

screw (3).

Electrical Connection

•Make sure the vacuum connection is properly

made.

• The VGC083C/ VGC094control unit must be

turnedoff before any work is performed on the

gauge or sensor cable.

Connect the sensor cable to the gauge and to the INFICON

measurement unit.

Operation

The gauge is ready for operation as soon as it has been

connected.

Gas type Dependence

The measuring signal depends on the type of gas being

measured. The value displayed is accurate for dry air, N

2

, O

2

and CO. It can be mathematically converted for other gases.

This can be done by entering the corresponding calibration

factor on the measurement unit (Appendix).INFICON →

Ignition Delay

When cold cathode measurement systems are activated, an

ignition delay occurs. The delay time increases at low pres-

sures and for clean, degassed gauges it is typically:

1×10

-7

minute mbar≈0.1

1×10

-8

1 minute mbar≈

1×10

-9

5 mbar≈minutes

1×10

-10

minutes (MAG060 only) mbar≈20/070

1×10

-11

minutes (MAG070 only) mbar≈90

The ignition is a statistical process. Already a small amount

of depositions on the inner surfaces can have a strong in-

fluence on it.

Contamination

Gauge failures due to contamination are not covered by the

warranty.

Cold ca-thode gauges are subject to contamination. The de

gree of contamination and subsequently the accuracy of the

measured value depend on:

• the pressure in the vacuum chamber

•-contaminants inside the vacuum chamber (vapors, pro

cess particles, etc.)

•ent current. the measurem

To avoid extensive contamination switch the gauge

on only at pressures of <10

-2

mbar.

VGC094 only: If the gauge is frequently operated at

pressures between 3×10

-

5

mbarand 1×10

-

2

mbar,

use measurement boards which limit the current to a

maximum of 100 µA (→Operating Manualof

INFICON VGC094). measurement boards for

Contamination generally has the effect that the pressure indi-

cation is too low. If the contamination is severe, instability

occurs. Contamination layers can peel off in the measuring

chamber and cause short circuits.

Depending on the operating conditions, cleaning may there-

fore be necessary after a few days or after a few years.

D einstallation

C ontaminated parts

Contaminated parts can be detrimental to health

and environment.

Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant

regulations and take the necessary precautions

when handling contaminated parts.

Caution

V acuum component

Dirt and damages impair the function of the

vacuum component.

When handling vacuum components, take ap-

propriate measures to ensure cleanliness and

prevent damages.

Caution

Dirt sensitive area

Touching the product or parts thereof with bare

hands increases the desorption rate.

Always wear clean, lint-free gloves and use

clean tools when working in this area.

Procedure

Turn / VGC094 control unit. off the VGC083C

Vent the vacuum system and disconnect the sensor

cable from the gauge.

Remove gauge from the vacuum system and install the

protective lid.

Maintenance

Sensor failures due to contamination are not covered by the

warranty.

ø63.5

92

97.5

DN 40 CF-F

DN 25 ISO-KF

DN 40 ISO-KF

AF 7

Vacuum

chamber

4

3

7

Original: English

Product specificaties