INFICON Zevision IMC300 Handleiding
Pagina's 181 Controller
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Operating Manual
Zevision
®
IMC300
Deposition Controller
INFICON
Two Technology Place
East Syracuse, NY 13057-9714
INFICON GmbHTable of Contents
074-786-P1A IMC300 Operating Manualiii
Table of Contents
1Trademarks, Disclaimer, Copyright..............................................................................................................7
2Warranty..........................................................................................................................................................8
3Declaration of Conformity.............................................................................................................................9
4Introduction..................................................................................................................................................10
4.1Safety...................................................................................................................................................10
4.1.1Definition of Notes, Cautions, Warnings, and Dangers........................................................10
4.1.2General Safety Information...................................................................................................11
4.1.3Earth Ground........................................................................................................................12
4.2How to Contact Us...............................................................................................................................13
4.2.1Returning the Product...........................................................................................................13
4.3IMC300 Aftercare Plan.........................................................................................................................13
4.4Unpacking and Inspection....................................................................................................................14
4.5Specifications.......................................................................................................................................15
4.6Configurations and Accessories...........................................................................................................18
4.6.1IMC300 Configuration...........................................................................................................18
4.6.2Accessories..........................................................................................................................19
4.7Initial Power-On Verification.................................................................................................................20
5Installation....................................................................................................................................................21
5.1Introduction..........................................................................................................................................21
5.2Front Panel...........................................................................................................................................22
5.3Rear Panel...........................................................................................................................................23
5.4System Connections............................................................................................................................25
5.5Ground Requirements..........................................................................................................................26
5.5.1Connections to Earth Ground...............................................................................................26
5.5.2Establishing Earth Ground....................................................................................................27
5.6Rack Mount..........................................................................................................................................27
5.6.1Full Rack Extender...............................................................................................................27
5.6.1.1Inventory..............................................................................................................28
5.6.1.2Installation...........................................................................................................28
5.6.2Rack Adapter........................................................................................................................29
5.6.2.1Inventory..............................................................................................................29
5.6.2.2Installation...........................................................................................................29
5.7I/O Connections...................................................................................................................................31
6Operation......................................................................................................................................................33
Product specificaties
| Merk: | INFICON |
| Categorie: | Controller |
| Model: | Zevision IMC300 |
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